Progress on Single Particle EPMA/EDS Quantitative Analytical Methods

In this paper, electron probe micro analysis/energy dispersive X-ray spectroscopy (EPMA/EDS) related aspects such as sample preparation methods, quantitative correction methods, measurement conditions and data processing methods etc. were introduced briefly. And the new research progress and achievements, development trend and application prospects were also reviewed. And the problems existed in this research field in domestic were pointed out and some corresponding problem-solving proposals were also proposed.